Application of Chemical Filter in Electronic Industry
Release time:
2023-02-10
In high-tech enterprises such as integrated semiconductor devices and microelectronics, with the increase of product process complexity and the reduction of product process line width, gaseous molecular pollutants in the air (hereinafter referred to as AMC) often lead to product yield degradation and performance degradation and failure,chemical filterPlays an important role, then, let's learn about the application of chemical filters in the electronics industry!
The International Association of Semiconductor Equipment and Materials gives a classification system for AMC gases in SEMI F21-95 and F21-1102. The standard is applicable to the clean environment of the semiconductor industry and specifies four "standard ranges": acid (MA), alkali (MB), condensate (MC) and impurity (MD).
The hazards of AMC, take the circuit board as an example: the common chemical faults of the circuit board are copper creep corrosion and silver plating corrosion of surface mount components. Sulfur-containing gases and moisture will corrode all copper plating on the circuit board. The resulting copper sulfide will cause the circuit board to creep and may cause short circuits between adjacent support features. At the same time, sulfur-containing gases can corrode silver, forming silver sulfide; the accumulation of large amounts of silver sulfide can generate mechanical stress, destroy the integrity of the package, and cause further corrosion until all the silver in the part is consumed, causing an open circuit.
In a clean room, pollution includes not only dust particles in the strict sense, but also solids, liquids, gases, heat, electromagnetism, etc. that have any interference effect. Most clean rooms are equipped with chemical filters or high efficiency filters. They are very effective for controlling particles above 0.5 microns, but they are not effective for small molecule AMC, which is filtered by traditional physical filtration. There is a risk of secondary pollution, which requires the use of chemical filters, which is inseparable from the working principle of chemical filters.
Chemical filters selectively adsorb harmful gas molecules, rather than mechanically "filtering" odors, corrosive gases, toxic gases and other impurities in the air like ordinary filters.
Chemical filters usually use activated carbon, activated alumina, ion exchange resin and other purification media as a filter material. Zhongjian South provides a variety of chemical filtration products, which can achieve the effect of removing pollutants through reasonable configuration.
Different industries and different places have different requirements on the concentration of gaseous pollutants after purification. In industries such as semiconductors and microelectronics, the use of chemical filters can effectively remove "molecular contaminants" and protect sensitive electronic systems and printed circuit boards. The influence of acid gas and moisture can improve product quality, increase product yield, and protect the health of workers.
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